Watkins Johnson 1500

Features:
Capable of 100mm, 125mm, 150mm, and 200mm wafer processing
Process extendibility from 0.5 micron to 0.08 micron
Characterized process models for Atmospheric Pressure processes
SMIF/AGV compatible, complying with SEMI specifications
Process muffle environment designed for process flexibility
Four matched deposition chambers are environmentally controlled to provide continually repeatable film results.
High dopant incorporation in bulk film for best planarization
High throughput due to high deposition rate in bulk film
Low cost of ownership