TEL ACT 12

Ref : 2611497-9-CP

Condition : Used

Manufacturer : TEL

Model : ACT 12

Year(s) : -

Quantity : 1

Location : Seller or machines location:
AMERICA North (USA-Canada-Mexico)

- Still installed in the cleanroom
- The tool is connected in-line with a Nikon S204B scanner
- The direction of wafer flow is right to left
- 300mm – 12inch wafer setup
- Type 4 Main controller
- Dual Block
- Dispense Monitoring system on all 24 resist lines
- Aut- air vent function on all resist LE tanks
- 4 FOUP load ports for 12” wafers
- 2 COT units
- 2 BARC units
- 4 DEV units
- 1 WEE unit

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