KLA-Tencor UV-1070, Thin Film

Brand: KLA-Tencor
Model: UV-1070, Thin Film
Measurement System

Used
Details:
Refurbished to meet OEM Specifications
Thin film measurement tool with broadband
UV optics and dual beam spectrophotometry
System set up SMIF
Applications include polysilicon
UV reflectivity, and simultaneous oxide
and TiN thickness for CMP applications
PC Based w/ Windows NT
Simultaneous multilayer
and ESML measures over 500 discrete wavelengths
SECS II interface included
Stainless steel safety shield to enclose wafer handler
GEM software package
LED Display
Wafer plane exhaust
Horizontal illumination optics assembly
Xenon lamp
Wafer Size up to 200