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KLA-Tencor Surfscan 7600 Particle Inspection System
Ref :
1935107-9-W
Condition :
Used
Manufacturer :
KLA-Tencor
Model :
Surfscan 7600 Particle Inspection System
Year(s) :
-
Quantity :
1
Location :
Seller or machines location:
AMERICA North (USA-Canada-Mexico)
AMERICA North (USA-Canada-Mexico)
Last check :
16 Jul. 2021
1x, KLA-Tencor Surfscan 7600 Particle Inspection System
A particle inspection tool - capable of up to 200mm wafers.
Specifications:
Particle sensitivity: 0.15um diameter latex spheres on bare silicon
and patterned process wafers.
Substrate speed: 2.6mm/s forward motion speed while scanning
Throughput: 30 wafers per hour for 8" wafers
Light source: Argon laser
Spatial resolution: 50um minimum spacing between particles.
Wafer rotation: System will accept up to ±3.0° pattern rotation relative
to the flat or notch
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