Estek WIS 8000/800, Wafer Inspection System

MANUFACTURE:
Estek
MODEL/TYPE#:
WIS 8000/800
▬▬▬▬▬▬▬▬▬▬▬▬▬▬▬▬▬▬▬▬▬▬▬
DESCRIPTION:
Wafer Inspection System

The Estek WIS 8000/800 is designed to
analyze substrates, films, and oxides.

FEATURES:
2 to 8 inch setup
Dark and light (dual) channel system
2 Cassette system

SPECIFICATIONS:
Detection 0.22um on silicon at 95% capture rate
Verified by NIST Standards
2 to 8 inch capable with proper setup
Current configuration is 4 to 8 inch
Dark and light channel system
Dark channel is used for detecting particles and any light scattering defects
Light channel is useful for detecting non-light scattering defects such as
mounds, dimples and non uniformity
Detects specular flaws, including large particles, mounds,
dimples, saw marks, grooves, fractures, slip, epi-spikes,
small particles on large grained surfaces, particles buried in/under a film
Remanufactured System to factory production specifications
NIST Calibration
Automatic cassette-to-cassette robotic wafer transport system
Non-contaminating robotic wafer handling system with sorting capability
Wis-8000 model/ includes two random access stages
Wafers per hour, 120
Configured to run Fluoroware PA-72 Series Cassette
Data printer
Color Monitor to display wafers