ADE, KLA-Tencor 6035

Features:
Non-contact
Accurate
Digital display
Temperature compensation
High or Low Resistivity

Specifications:
TMA Gap: 0.040”/1 mm minimum-standard. TMA input/output via plug-in cable.
Wafer Thickness: 100 to 750 microns
DISPLAYS Reading: 3.5 digit, autoranging
Range (Ohm-cm) Resolution (Ohm-cm) 0.10-0.1999 0.0001 0.200-0.999 0.001 0.10-19.99 0.01 20.0-99.9 0.1
HI/Lo Lights: Illuminates if measurement exceeds preset limits.
Overrange: Illuminates if dynamic range is exceeded; blinks if too thick wafer is used.