Branson / IPC IPC L3200

Brand: Branson
Model: IPC L3200
Dual quartz chambers
for 100-150mm wafers
cassette to cassette operation
Automatic pick-and-place wafer handling
Automatic pneumatic
soft-lift assemblies for
each chamber in-line gas filters (0.05 micron)
T-o PM 732 automatic networks
Quartz halogen lamp for preheating
Process capability:
Positive and negative resist
hardened resist, polyimide
Process control and instrumention
Microprocessor controller, menu driven
Programmable process parameters
gas flow, chamber pressure
RF power, strip time, heat lamp on time, overstrip time
Programmable tolerance limits: RF power
(forward and reflected), time pressure, gas flow, pumpdown
Automatic pressure control
Programmable tolerance limit alarm
Dual quartz chambers
for 100-150mm wafers (or 150-200mm wafers)
cassette to cassette operation.