Sentech Senduro 300

Thin Film measurement
Version: Up to 300 MM
Vintage: 01.06.2008
SENTECH Senduro 300 The SENDURO® 300 is
a powerful automated tool for the measurement of
single films and layer stacks on silicon wafers of
up to 300 mm diameter.
Highlights and Advantages Measurement recipes
(one-click applications) Starting with
SENTECH’s predefined recipe library the user quickly selects the
desired measurement task and executes the complete sequence at
once: automated alignment,data acquisition sample modeling
analysis of single or multi-layer samples by
fitting the model to the measured data display of
results reporting of measured data.