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March Instruments PX-1000 Batch RIE Asher/Etcher System
Ref :
1324062-9-W
Condition :
Used
Manufacturer :
March Instruments
Model :
PX-1000 Batch RIE Asher/Etcher System
Year(s) :
-
Quantity :
1
Location :
Seller or machines location:
AMERICA North (USA-Canada-Mexico)
AMERICA North (USA-Canada-Mexico)
Last check :
24 Apr. 2020
Brand: March
Model: PX-1000 Batch
RIE Asher/Etcher System
Used
Details:
Downstream RIE or isotropic
plasma barrel asher/etcher system
Features:
Refrigerated circulator: Remcor CFF-500
RF generator: Advanced energy RFX-600
(AE RFX-600)
Digital panel meters
Reactor center material: stainless steel
5 shelves unit
5 gas output
Specifications:
Chamber interior dimensions (inches): 16.25W x 17H x 20D
Exterior dimensions: 33W x 24.5H x 36D
1000 Watt output
Power requirements: 220V, 50/60 Hz, 1 phase
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