KLA-Tencor OmniMap AutoRS75TC

Wafer Resistivity Measurement
Version: 150-200 mm
Vintage: 01.06.1996
The equipment is still installed in the cleanroom.
Upon purchase, buyer to pay for de-installation and
rig out of fab. Equipment condition: very good.
Configuration notes: wafer sheet resistance measurement system,
Tool in production.
-Stand-alone version
-Prometrix style robot with no clean enclosure
-wafer loading via 2 x 8 inch open cassettes
-DOS based software.
Currently used for measurements on both 6 and 8 inch wafers.