HSEB, ZEISS Axiospect 300 Automated Wafer Inspection

Wafer inspection/review station for bare and patterned wafers
Inspect 300mm wafers in FOUP loaders or 200mm wafers in
open cassetes with adaptors
2 FOUP loaders
Axiotron 300 microscope
Equipe robot with PRE-5120 prealigner
300mm wafer chuck with 300mm x 300mm xy stage
DIC, brightfield, darkfield objectives: Epiplan Neofluar 2.5 HD,
Epiplan Neofluar 10,20,50 HD DIC, Epiplan Apochromat 100 HD DIC
xenon light source with fiber cable
Windows NT operating system with SmartVIEW ver.4.13 software for
visual inspection and defect classification,
wafer mapping, file management, image handling and processing.