Glen R3A

PLC controlled and offers real-time plain English readout of system operating parameters together with remedial action in the event of an abort.
Active Plasma for routine cleaning of sample surfaces
Electrodes: (2) 14 x 14-inch electrode sets; capable of up to 8 sample trays
3 Plasma Modes: ACTIVE PLASMA for routine cleaning of sample surfaces;RIE PLASMA for aggressive cleaning of non-ESD sensitive samples; DOWNSTREAM ELECTRON-FREE PLASMA for cleaning sensitive electronic components
Gas Inputs: dual gas inputs with needle valves, PLC-controlled
Computer Interface: RS 232 interface
Power Requirements: 110Volt
Full Load Current Rating: 13 Amp
RIE Plasma for aggressive cleaning of non ESD sensitive samples
Downstream, Electron-Free Plasma for cleaning sensitive electronic components
The Glen R3A Plasma Cleaner can be operated in a single or dual plasma sequence
Advanced Energy PE-1000 AC Plasma Power Source; 500w@ 40khz

The item is only for end users. It is subject to prior sales without notice. Appreciate your time.
Please visit our website for our main refurbished equipment at https://www.semistarcorp.com/product-category/refurbished-hot-items/

SemiStar Corp. provides the following plasma asher, plasma descum, plasma clean, dry clean equipment at complete, working, functional test or refurbished condition with OEM specifications, warranty and installation (optional).

Branson/IPC 3000

Branson/IPC L3200

Gasonics L3510

Gasonics Aura 3010

Gasonics Aura 1000

Gasonics Aura 3000

Gasonics Aura 2000

Matrix 105

Matrix 205

Matrix 209S

March PX-250

AST Barrel Asher

PlasmaEtch PE-100

Plasma Etch BT1

Technics 2000

Technics PE-IIA