Gasonics Aura 3010 Photoresist Asher

Ref : 1324070-9-W

Condition : Used

Manufacturer : Gasonics

Model : Aura 3010 Photoresist Asher

Year(s) : -

Quantity : 1

Location : Seller or machines location:
AMERICA North (USA-Canada-Mexico)

Last check : 24 Apr. 2020

Brand: GaSonics
Model: Aura 3010 Photoresist Asher

Used
Details:
A downstream photoresist removal system
A damage-free asher with closed loop temperature control. 5 - 8 inch (125mm-200mm) wafer capability.
5 - 8 inch (125mm-200mm) Wafer Capability.
Small footprint
High throughput
Fully automated downstream microwave asher.
optional SMIF by Asyst LPT-2200.
Lamp heating for slow or fast heat ramp.
Microwave, lamp, and endpoint detector monitors.
Computer controlled, multiple-step capability
SECS II Interface (optional)

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