Gasonics AE2001 Etch System

Ref : 1324055-9-W

Condition : Used

Manufacturer : Gasonics

Model : AE2001 Etch System

Year(s) : -

Quantity : 1

Location : Seller or machines location:
AMERICA North (USA-Canada-Mexico)

Last check : 24 Apr. 2020

Brand: GaSonics
Model: AE2001 Etch System

Used
Details:
Microwave downstream etcher
Features:
Cassette to cassette wafer handling
Front and backside etching
Variable platen temperature
Alumina (ceramic) plasma tube
Fluorine compatible chamber
SECS II interface
Multiple step process caability
Stand alone/ floor standing model

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