Gasonics 7104, Plasma Etch System

Ref : 1168417-9-W

Condition : Used

Manufacturer : Gasonics

Model : 7104, Plasma Etch System

Year(s) : -

Quantity : 1

Location : Seller or machines location:
AMERICA North (USA-Canada-Mexico)

Last check : 08 Aug. 2014

Brand: GaSonics
Model: 7104
PLASMA ETCH SYSTEM

Specifications
• Used
• Front and backside isotropic removal
• Downstream ashing for minimized device damage
• Pick and place wafer handling
• Precise endpoint detection
• Pressure control option
• SMIF compatible
• SECS II interface, multiple process step capability
• Variable lamp heating for temperature control
• Table top or floor/through the wall designs.
• Specifications:
• Small footprint: 80cm (32") width x 80cm (32") length x 70cm (28") height
• 75mm - 150mm wafer cpabaility
• Up to 2 MFC's

Other machines similar to Gasonics 7104, Plasma Etch System

1 Gasonics PEP-4800DL

Location : AMERICA North (USA-Canada-Mexico)

Year(s) : 1999

1 Novellus 99-0339 Aura A2000LL Plasma Asher Stripper GaSonics Non-Copper Surplus

Location : EUROPE (Western and Northern)

1 Branson / IPC 2000

Location : AMERICA North (USA-Canada-Mexico)

1 AST Plasma Etch

Location : AMERICA North (USA-Canada-Mexico)