CHA Mark 50
Ref :
2068116-9-W
Condition :
Used
Manufacturer :
CHA
Model :
Mark 50
Year(s) :
-
Quantity :
1
Location :
Seller or machines location:
AMERICA North (USA-Canada-Mexico)
AMERICA North (USA-Canada-Mexico)
Last check :
24 Apr. 2020
4 pocket e-beam gun with rotation
N2 trap
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SR10 high voltage power supply quartz heaters
1 planet tooling for customer's wafer size
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Granville-Phillips 307 ionization guage control
IC5 Inficon rate and thickness deposition control
Fully automatic control
Water cooling CTI water pump
Chamber shielding
CTI 9600 compressor
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