Branson / IPC L3200 8 inch

Configuration:

One chamber with one Equipe PRI ATM-104-1 robot and ESC-200 controller;
2 gas lines with MFCs: O2 a 5 L MFC for gas 1 and a 500 mL CF4 MFC for gas 2
System is for 8 inch round wafer;
System can run long time recipe(4 hours);
new type DC power box and AC power box;
Upgraded with Allwin21 Corp proprietary AW-3210 AW software package with PC control and New Main Control Board. V.7.E42
Black Waffer Disc Tray
DB25 Serial RS232
End Effector Dimensions: 7.75″x1.25″ (LxW)
​N2 Purge
Air Gauge: Dwyer RMA-5-99V
Eurotherm 808 Temperature Controller
MKS BARATRON SENSOR 10 TORR,
MKS 622A11TDE
Type: 622


The item is only for end users. It is subject to prior sales without notice. Appreciate your time.
Please visit our website for our main refurbished equipment at https://www.semistarcorp.com/product-category/refurbished-hot-items/


SemiStar Corp. provides the following plasma asher, plasma descum, plasma clean, dry clean equipment at complete, working, functional test or refurbished condition with OEM specifications, warranty and installation (optional).

Branson/IPC 3000

Branson/IPC L3200

Gasonics L3510

Gasonics Aura 3010

Gasonics Aura 1000

Gasonics Aura 3000

Gasonics Aura 2000

Matrix 105

Matrix 205

Matrix 209S

March PX-250

AST Barrel Asher

PlasmaEtch PE-100

Plasma Etch BT1

Technics 2000

Technics PE-IIA