AG Associates 610

Steady State Temperature Range: 400°C - 1200°C Steady State Temperature Stability: (+ or -) 7°C Heating Rate: 150c Per Second Cooling Rate: Temperature Dependent - Max. 150°C Per Second Capability of 2" to 6" wafers Specifications: System refurbishment includes: Replacement of Quartz Chamber Unit includes one quartz tray (Note: customer to specify size) Replacement of all lamps All electronics are thoroughly tested for full functionality, if bad then replaced All tubing is replaced System covers are stripped & repainted with particle-free paint